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0010-13622 RF Match forversusK 465 GaN MOCVD

Applied Materials 0010-13622 RF Match for, Veeco K 465 GaN MOCVD, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-13622 RF Match forApplied Materials
OEMApplied MaterialsVeeco
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13622 RF Match forVeeco K 465 GaN MOCVD
Specifications
ConfigurationHigh Efficiency HE RF Match-Bias[1]K465 GaN Turbo disk[2]
Model0010-13622[1]—
Product TypeRF Match for PVD (Physical Vapor Deposition)[1]—
FeatureHigh Efficiency HE RF Match-Bias[1]—
Phase—3 Phase, 5 Wire[2]
Voltage—380 Vac, 280 A, 50/60 Hz[2]
Process—GaN MOCVD[2]
Power—3 Phase, 5 Wire, 380 Vac, 280 A, 50/60 Hz[2]
Vintage—2010 (asset 151584), 2010 (asset 151583), 2010 (asset 151582), 2009 (asset 151581), 2009 (asset 151580)[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing