Waferpedia

Comparison ledger

0010-03485 Magnet AssyversusSU 3200 Single Wafer Processing

Applied Materials 0010-03485 Magnet Assy, SCREEN SU 3200 Single Wafer Processing, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03485 Magnet AssyApplied Materials
OEMApplied MaterialsSCREEN
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-03485 Magnet AssySCREEN SU 3200
Specifications
ConfigurationWP AL 300mm PVD[1]12 Chamber Aquaspin[5]
OEMApplied Materials[1]—
Model0010-03485[1]—
DescriptionMAGNET ASSY, WP AL 300MM PVD[2]—
ProcessPVD[3]SOM / SPM / SC1/ SC2 / 03W / DHF[5]
Wafer size300mm[4]12 inch (300 mm)[5]
VersionSpares[4]—
Part Number0010-03485[1]—
ManufacturerApplied Materials[1]—
Process TypePVD (Physical Vapor Deposition)[1]—
Application (Material)Aluminum (AL)[1]—
Wafer Diameter (associated)300 mm[1]—
Factory Interface—FOUP (4)[5]
Handler System—Kawasaki[5]
Software Version—Standard[5]
CIM—SECS / GEMS[5]
Software version—P2485STD00V2485STD00[6]
System power rating—208AC-3 Phase[6]
Maximum chambers—12 chambers in four three-level towers[7]
Throughput—up to 800 wafers per hour (WPH)[7]
Chemical supply options—dynamic direct injection (DDI) or cabinet-type chemical supply system[7]
Chamber volume reduction—about one-third of the previous model[7]
Processes—SOM / SPM / SC1/ SC2 / 03W / DHF[5]
Power rating—208AC-3 Phase[6]
Sources (7)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]semistarcorp.comsemistarcorp.com
  3. [3]layla-ec.comlayla-ec.com
  4. [4]fabsurplus.comfabsurplus.com
  5. [5]inventory listing
  6. [6]inventory listing
  7. [7]screen.co.jpscreen.co.jp