Comparison ledger
Applied Materials 0010-03254 E Chuck, Tenney Lunaire TJR, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | Lunaire TJRTenney |
|---|---|---|
| OEM | Applied Materials | Tenney |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Tenney Lunaire TJR |
| Specifications | ||
| Manufacturer | — | Tenney Lunaire[1] |
| Model | — | TJR[2] |
| Description | — | Chamber[1] |
| Temperature range | — | -66°C to +200°C[2] |
| Control | — | Watlow series 942[2] |
| Cooling | — | Cascade system[2] |
| Minimum tested temperature | — | -66C[2] |
| Tested cooldown | — | 20C to -66C in 83 minutes[2] |
| Power requirement | — | 120V/20A fused, NEMA 5-20R outlet required[2] |
| Interior dimensions | — | 11 in deep, 15 in wide, 12 in high[2] |
| Exterior dimensions | — | 37 in wide, 23 in deep, 26 in high[2] |
| Access port | — | One 2 in on left wall[2] |
| Refrigerant | — | R-404A/R-508B[2] |