Comparison ledger
Applied Materials 0010-03254 E Chuck, Pfeiffer TMU 064 Turbomolecular, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | TMU 064 TurbomolecularPfeiffer |
|---|---|---|
| OEM | Applied Materials | Pfeiffer |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Pfeiffer TMU 064 |
| Cited variants | — | |
| Specifications | ||
| Configuration | — | With TCP015 Controller[2] |
| Equipment type | — | Turbomolecular pump[1] |
| Make | — | Pfeiffer[2] |
| Model | — | TMU 064[2] |
| Controller | — | TCP015 controller[2] |
| Pumping speed for N2 | — | 53 l/s[1] |
| Pumping speed for He | — | 42 l/s[1] |
| Pumping speed for H2 | — | 31 l/s[1] |
| Nominal rotation speed | — | 90,000 l/min[1] |
| Standby rotation speed | — | 60,000 l/min[1] |
| Run-up time | — | 2.5 min (up to 90% rated rotation speed)[1] |
| Noise level | — | < 50 dB(A)[1] |
| Final pressure, backing pump | — | ≤ 5 mbar[1] |
| Inlet | — | DN 63 ISO-KF / DN 63 CF-F[1] |
| Outlet | — | DN 16 ISO-KF / G 1/4"[1] |
| Venting connection | — | G 1/8"[1] |
| Maximum permissible rotor temperature | — | 90°C[1] |
| Permissible heat radiation power | — | 4 W[1] |
| Maximum fore-vacuum pressure for N2 | — | 14 mbar[1] |
| Maximum fore-vacuum pressure for He | — | 10 mbar[1] |
| Maximum fore-vacuum pressure for H2 | — | 6 mbar[1] |
| Maximum gas throughput for N2 | — | 1.1 mbar[1] |
| Maximum gas throughput for He | — | 1.5 mbar[1] |
| Maximum gas throughput for H2 | — | 1 mbar[1] |
| Final pressure with diaphragm vacuum pump | — | < 1 x 10^-8 mbar[1] |
| Final pressure with rotary vane vacuum pump | — | < 2 x 10^-10 mbar[1] |
| Lubricant | — | TL 011[1] |
| Cooling type | — | standard convection[1] |
| Cooling water consumption | — | 15 l/h with water at 15°C[1] |
| Cooling water temperature | — | 5-25°C[1] |
| Permissible ambient temperature with air cooling | — | 0-35°C[1] |
| Heating power consumption | — | 40 W[1] |
| Weight | — | 3.6 / 3.8 kg[1] |
| Permissible magnetic field | — | 4 mT[1] |