Waferpedia

Comparison ledger

0010-03254 E ChuckversusDuo 35 M Vacuum

Applied Materials 0010-03254 E Chuck, Pfeiffer Duo 35 M Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsPfeiffer
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Pfeiffer Duo
Specifications
Pumping Speed S(N2)—36.0 m3/h[1]
Max Speed (n)—1800 rpm[1]
Oil Type—Pfeiffer P3 vacuum oil[1]
Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing