Comparison ledger
Applied Materials 0010-03254 E Chuck, Edwards FL 20 K Foreline Trap, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | FL 20 K Foreline TrapEdwards |
|---|---|---|
| OEM | Applied Materials | Edwards |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Edwards FL 20 K Foreline Trap |
| Specifications | ||
| Ambient operating temperature range | — | 0 to 50 °C[1] |
| Maximum internal pressure | — | 1 bar absolute, 1 x 10^5 Pa[1] |
| Mass | — | 1 kg[1] |
| Sorbent charge | — | 0.07 kg[1] |
| Leak tightness (1 bar differential) | — | 1 x 10^-6 mbar ls-1, 1 x 10^-4 Pa ls-1[1] |
| Trapping efficiency for oil mist | — | 99.7%[1] |
| Sorbent material | — | Activated alumina[2] |
| Body material | — | Cast aluminum[3] |
| Flange type | — | ISO KF25 (NW25)[3] |
| Dimensions (height x width) | — | 5.5 x 4 inches[3] |
| Weight | — | 1.5 lb[3] |
| Compatible pump models | — | RV3, RV5, RV8, RV12, E2M2, E2M5, E2M8, E2M12, E1M18, E2M18, E2M28, E2M30[4] |
| Rejuvenation method | — | Bake basket for 2 hours at 250-300 °C[1] |
| Part numbers | — | A13305000, A133-05-000, H026-00-050, H02600050[3] |
| Leak tightness | — | 1 x 10^-6 mbar l/s (1 x 10^-4 Pa l/s)[1] |
| Oil mist trapping efficiency | — | 99.7%[1] |
| Sorbent rejuvenation | — | Bake basket at 250 °C - 300 °C for 2 hours[1] |
| Fits pump models | — | RV3, RV5, RV8, RV12, E2M2, E2M5, E2M8, E2M12, E1M18, E2M18, E2M28, E2M30[3] |
| Inlet/Exhaust flanges | — | ISO KF25 (NW25)[3] |
| Dimensions | — | Height 5.5 inches, Width 4 inches[3] |
| Material | — | Cast Aluminum[3] |