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Comparison ledger

AIX G 5 WW EPIversus0020 17485 Part

Aixtron AIX G 5 WW EPI, Applied Materials 0020 17485 Part, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 17485 PartApplied Materials
OEMAixtronApplied Materials
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAixtron AIX G 5 WW EPIApplied Materials 0020 17485 Part
Specifications
OEMAixtron[1]—
ModelAIX G 5 WW[1]—
Equipment nameAIX G 5 WW EPI (Epitaxial Silicon Deposition)[1]—
Wafer size6 inch[1]—
ProcessEpitaxial silicon deposition[1]—
Frequency60 Hz[2]—
Phase3 Phase[2]—
Voltage208 V / 120 V AC[2]—
Configuration4 Wire + Ground[2]Strap, RF Out 2 Balanced Coil Match, Hdp[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing