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Comparison ledger

E 500 EHPIversus160 XP Ion

Agilent E 500 EHPI, Varian 160 XP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
E 500 EHPIAgilent
160 XP IonVarian
OEMAgilentVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAgilent E 500Varian 160 XP Ion
Specifications
ConfigurationMedium Current[1]150mm High Current IMP[2]
Current TypeMedium Current[1]—
Wafer Size8 inch[1]—
Vintage Year2003[1]—
OEM—Varian[3]
Model—160 XP Ion[3]
Category—Ion Implantation[2]
Tool type—ion implanter[2]
E 500 EHPI entry160 XP Ion entryAsk about these tools →Share experience with this comparison →

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing