Waferpedia

Comparison ledger

11980 AversusNewView 8000

Agilent 11980 A, Zygo NewView 8000, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
11980 AAgilent
OEMAgilentZygo
CategoryPrecision OpticsPrecision Optics
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAgilent 11980 AZygo NewView 8000
Cited variants—
  • NewView 8200[1]
  • NewView 8300[1]
Specifications
Wavelength Range1250-1600 nm[2]—
Manufacturer—Zygo[3]
Model—NewView 8000[3]
Product category—Optical Profilers[3]
Related item—176mm Riser kit, NewView 8000/9000[3]
Measurement technique—3D coherence scanning interferometry including SureScan technology[1]
Profiling type—3D optical surface profiler[4]
Form factor—benchtop surface profiler[1]
Non-contact operation—non-contact[4]
Software—Mx software[1]
Stage options—manual, motorized, and encoded stage options[1]
Sample stage XY travel—manual XY: 100 mm travel; motorized XY: 150 mm travel[1]
Tilt range—±4°[1]
Maximum scan rate—96 μm/sec (NewView 8300); 34 μm/sec (NewView 8200)[1]
Surface topography repeatability—0.12 nm for all magnifications[1]
Repeatability of RMS—0.01 nm[1]
Field of view—from 16 × 16 mm to 40 × 40 μm[1]
Dimensions—75 × 64 × 56 cm benchtop mainframe; 151 × 73 × 61 cm with stand[1]
Weight—91 kg benchtop configuration; 229 kg with stand configuration[1]
Input voltage—100 to 240 VAC, 50/60 Hz[1]
Compressed air requirement—4.1 to 5.5 bar (60 to 80 psi), dry and filtered[1]
Open work area—open work area with clear lines of sight[4]
Available configurations—single zoom NewView 8200 and triple zoom NewView 8300[4]
Sample staging—fully manual X/Y and tilt stages to fully automated stages with 150 mm of travel and 4 degrees of tilt[4]
Product type—Non-contact benchtop surface profiler[5]
Configurable models—NewView 8200 and NewView 8300[4]
XY stage travel—Manual XY: 100 mm travel; Motorized XY: 150 mm travel[1]
Vertical scan range—150 µm with precision Piezo drive; 20 mm with extended scan[1]
Maximum data scan speed—34 µm/sec[1]
Physical dimensions, benchtop mainframe—75 x 64 x 56 cm[1]
System weight, benchtop configuration—91 kg[1]
Work volume, standard system—89 x 150 x 150 mm[5]
Work volume, optional riser kit system—265 x 150 x 150 mm with optional 176 mm riser kit[5]

Plan your fab

Building a Precision Optics process? Get a complete equipment list.

Open the fab equipment planner →
Sources (5)Every fact above is drawn from these public sources
  1. [1]lambdaphoto.co.uklambdaphoto.co.uk
  2. [2]waferpedia.comwaferpedia.com
  3. [3]store.zygo.comstore.zygo.com
  4. [4]ptscmetrology.comptscmetrology.com
  5. [5]lambdaphoto.co.uklambdaphoto.co.uk