Comparison ledger
Agilent 11980 A, Zygo Newview 5000 White Light, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 11980 AAgilent | |
|---|---|---|
| OEM | Agilent | Zygo |
| Category | Precision Optics | Precision Optics |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Agilent 11980 A | — |
| Specifications | ||
| Wavelength Range | 1250-1600 nm[1] | — |
| Tool type | — | Non-contact 3D surface profiler[2] |
| Measurement method | — | Scanning white light interferometry[2] |
| Objectives | — | 5x, 10x, 50x[2] |
| Vertical resolution | — | 0.1-20nm (FDA resolution setting dependent)[2] |
| Lateral resolution range | — | 0.64-2.6μm (objective dependent)[2] |
| Max vertical step height | — | 5mm[2] |
| Vertical scan rate | — | ≤ 10μm/sec[2] |
| Sample type | — | Opaque and transparent surfaces[2] |
| Max roughness | — | ≤ 100μm Rp[2] |
| Reflectivity | — | 4-100%[2] |
| Max sample thickness | — | 104mm[2] |
| Objective working distances | — | 5x = 9.3mm; 10x = 7.4mm; 50x = 3.4mm[3] |
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