Comparison ledger
Accretech UF 200 S, Filmetrics RS50, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | UF 200 SAccretech | RS50Filmetrics |
|---|---|---|
| OEM | Accretech | Filmetrics |
| Category | Test & Probe | Test & Probe |
| Wafer size | 200mm | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Accretech UF 200 | Filmetrics RS50 |
| Specifications | ||
| Air | Over 0.45 MPa[1] | — |
| Vacuum | Over -53K MPa[1] | — |
| Voltage | 208 VAC, Single Phase[1] | — |
| Frequency | 50/60Hz[1] | — |
| Wiring Configuration | 2Wire + Ground[1] | — |
| Full Load AMPS | 7.2A[1] | — |
| Main Breaker Rating | 10A[1] | — |
| Interrupt Current | 10KA A.I.C[1] | — |
| Diagram Number | FE06000[1] | — |
| Configuration | Yield Check Function[1] | — |
| Loader, Wafer Handling | Backside Holding[1] | — |
| Wafer Size | 5",6",8", Currently 8"(200mm) Configured[1] | — |
| X/Y axis | Probing Area(±120mm), Maximum Speed(200m/s)[1] | — |
| Power Consumption | Approximately 1.5kVA[1] | — |
| Air Supply Source Pressure | 0.45Mpa or more[1] | — |
| Manipulator | MHF300L[1] | — |
| Weight (Main Body) | 900kg (Standard)[1] | — |
| Type | — | 4 Point Probe System Mapping 4 point Probe system[2] |
| Sheet resistance range | — | 1 mohm/sq to 200 Mohm/sq[2] |
| Wafer capability | — | 200 mm wafers capable[2] |
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