Comparison ledger
Accretech , Tokyo Semitsu Kogaku (TSK) UF200, Asyst Versaport 2200 Indexer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | , Tokyo Semitsu Kogaku (TSK) UF200Accretech | |
|---|---|---|
| OEM | Accretech | Asyst |
| Category | — | — |
| Wafer size | Wafer Equipment | 2nd EPROM has the firmware for wafer cassettes (in spare) |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Accretech , Tokyo Semitsu Kogaku (TSK) UF200 | Asyst Versaport 2200 |
| Specifications | ||
| Wafer size | Wafer Equipment[1] | 2nd EPROM has the firmware for wafer cassettes (in spare)[2] |
| Date of Manufacture | 1998[1] | — |
| Currently Configured for | 200mm[1] | — |
| Current Equipment Status | Available[1] | — |
| Available date | Currently Available[1] | — |
| Equipment category | Production Wafer Prober[1] | — |
| P.N | — | 9700-5384-01 REV.4- used for both mask cassettes and wafer cassettes[2] |
| Configuration | — | 2 EPROM chips:[2] |
| Manufacturer | — | Asyst[2] |
| Model | — | Versaport 2200[2] |
| Part number | — | 9700-5384-01 REV.4[2] |
| Cassette type | — | 8” Cassette[2] |
| Mounting configuration | — | Bolt Back Plate[2] |
| RFID support | — | RFID Smart Tag support[2] |
| Firmware | — | 2 EPROM chips; 1st EPROM has firmware for mask cassettes (installed currently), 2nd EPROM has firmware for wafer cassettes (in spare)[2] |
| Cassette compatibility | — | Used for both mask cassettes and wafer cassettes[2] |
| Condition | — | Refurbished[2] |
| Sensor adjustment | — | The user just needs to adjust the sensor parameters via ISIM to work with your cassettes[3] |
| Technical manual | — | VersaPort 2200 Technical Manual, P/N 2000-1252-01, Rev. C, dated 6/12/2007[4] |