Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Onto Innovation Nanospec AFT 4150 Thin Film Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Nanospec AFT 4150 Thin Film MeasurementOnto Innovation | |
|---|---|---|
| OEM | ABM | Onto Innovation |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Onto Innovation Nanospec AFT |
| Cited variants | — |
|
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[2] | — |
| Description | ROBOT[2] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2] | — |
| Configuration | — | Parts machine[3] |
| Measurement type | — | Visible light film thickness (reflectometry)[1] |
| Power | — | 15VDC[1] |
| Manufacture date | — | June 06, 1996[1] |
| Country of manufacture | — | USA[1] |
| Optical head part number | — | 7200-1821 Rev B[1] |
| Rear connectors | — | DB-15 female (x2), BNC (x1)[1] |
| Enclosure | — | Black anodized aluminum optical bench on mounting base plate, with cream-colored outer housing[1] |
| Internal assembly | — | Motorized gear drive mechanism, adjustable mirror/lens mounts, circular objective lens port with internal optical detector[1] |
| Measured film thickness range | — | Tens to thousands of angstroms (for oxide and nitride films)[1] |
| Vintage | — | 1996[3] |