Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Edwards 12 Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 12 VacuumEdwards | |
|---|---|---|
| OEM | ABM | Edwards |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Edwards 12 Vacuum |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[1] | — |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Ultimate pressure | — | 2 × 10⁻³ mbar[2] |
| Pumping speed (50 Hz) | — | 12 m³/h[2] |
| Inlet Flange | — | NW25[2] |
| Noise level (50 Hz) | — | 48 dB(A)[2] |
| Weight | — | 26.30 kg (58.00 lb)[2] |
| Dimensions (L × H × W) | — | 0.490 m × 0.229 m × 0.158 m[2] |
| Power total rated @50 Hz | — | 370 W[2] |
| Power total rated @60 Hz | — | 440 W[2] |
| Ultimate pressure with gas ballast | — | 3 Pa[2] |
| Inlet/Outlet connection | — | DN 25 ISO-KF (NW25) / DN 25 ISO-KF (NW25)[2] |
| Water vapour throughput | — | 8.000 × 10⁻⁵ kg/s[2] |
| Max water vapour pressure | — | 3200 Pa[2] |
| Nominal rotational speed @50 Hz | — | 25.00 Hz[2] |
| Nominal rotational speed @60 Hz | — | 30.00 Hz[2] |
| Displacement @50 Hz max | — | 3.944 × 10⁻³ m³/s[2] |
| Displacement @60 Hz max | — | 4.722 × 10⁻³ m³/s[2] |
| Lubricant capacity | — | 39.67 to 61.02 in³[2] |
| Max inlet pressure (continuous) | — | 50000 Pa[2] |
| Max outlet pressure (continuous) | — | 1.2 × 10⁵ Pa[2] |
| Ambient temperature range (operation) | — | 12 °C to 40 °C[2] |
| Ambient temperature range (storage) | — | -30 °C to 70 °C[2] |
| Motor certification | — | UL (61010-1 3rd Edition), CSA (C22.2 No.61010-1-12)[2] |
| Max altitude | — | 2000 m[2] |
| Is pump wet or dry? | — | Wet (oil-sealed)[2] |
| Material rotor and stator | — | High grade cast iron[2] |
| Voltage/frequency | — | Single phase, 115/230 V, 50/60 Hz, factory set to 115 V for USA[2] |