Comparison ledger
ABM -407B-1-S-CES293 Robot, Thermo Fisher Scientific FEI Quanta 3 D FEG Dual Beam, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Scientific FEI Quanta 3 D FEG Dual BeamThermo Fisher | |
|---|---|---|
| OEM | ABM | Thermo Fisher |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | Thermo Fisher Scientific FEI Quanta |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[1] | Quanta 3 D FEG[3] |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Configuration | — | STEM detector[2] |
| OEM | — | Thermo Fisher Scientific / FEI[3] |
| Type | — | Dual Beam[3] |
| Year of Manufacture | — | 2009[3] |
| Included Components | — | STEM detector, Detector Amplifier, GSED detector, built-in optical high speed beam blanker, Scanservice Blanking Electronics, NPGS USB Enable Switch, NPGS Blanker Relay Box, at least one GIS Unit, spare parts including ion extractor, suppressor, new DGBS board, chiller[3] |