Comparison ledger
ABM -407B-1-S-CES293 Robot, Pfeiffer TPU 050 Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | TPU 050 VacuumPfeiffer | |
|---|---|---|
| OEM | ABM | Pfeiffer |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | Pfeiffer TPU 050 Vacuum |
| Cited variants | — | |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[3] | TPU 050[4] |
| Description | ROBOT[3] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[3] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[3] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[3] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[3] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[3] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[3] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[3] | — |
| Manufacturer | — | Pfeiffer[4] |
| Type | — | Turbomolecular vacuum pump[1] |
| Inlet flange | — | DN 63 CF[2] |
| Outlet flange | — | DN 16 KF[2] |
| Venting connection | — | DN 10 KF[2] |
| Volume flow rate for nitrogen | — | 50 l/s[2] |
| Volume flow rate for helium | — | 55 l/s[2] |
| Volume flow rate for hydrogen | — | 50 l/s[2] |
| Compression ratio for nitrogen | — | 8 x 10^8[2] |
| Compression ratio for helium | — | 2.5 x 10^4[2] |
| Compression ratio for hydrogen | — | 10^3[2] |
| Proposed backing pump, minimum | — | 1.5 m3/h[2] |
| Ultimate pressure, theoretical | — | 10^-11 mbar[2] |
| Ultimate pressure 1 | — | <1 x 10^-10 mbar[2] |
| Ultimate pressure 2 | — | <1 x 10^-9 mbar[2] |
| Ultimate pressure 3 | — | <5 x 10^-8 mbar[2] |
| Rated speed | — | 90,000 U/min[2] |
| Run-up time | — | 3 min[2] |
| Oil filling | — | 1 cm3[2] |
| Cooling | — | Standard, up to an ambient temperature of 30 °C, convection/water[2] |
| Cooling water requirement | — | 15 l/h[2] |
| Power input, heater | — | 40 W[2] |
| Magnetic field, max. | — | 7 mT[2] |
| Weight | — | 2.5 kg[2] |
| Volume flow rate for nitrogen (N2) | — | 50 l/s[1] |
| Volume flow rate for helium (He) | — | 55 l/s[2] |
| Volume flow rate for hydrogen (H2) | — | 50 l/s[1] |
| Compression ratio for nitrogen (N2) | — | 8 x 10^8[1] |
| Compression ratio for helium (He) | — | 2.5 x 10^4[2] |
| Compression ratio for hydrogen (H2) | — | 10^3[2] |
| Ultimate pressure | — | 1 x 10^-11 mbar[5] |
| Bearing description | — | Permanent magnetic bearing at the high vacuum side and oil lubricated ceramic bearing at the backing side[5] |