Comparison ledger
ABM -407B-1-S-CES293 Robot, Pfeiffer Duo 3 Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Duo 3 VacuumPfeiffer | |
|---|---|---|
| OEM | ABM | Pfeiffer |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | Pfeiffer Duo 3 Vacuum |
| Cited variants | — | |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[2] | Duo 3[5] |
| Description | ROBOT[2] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2] | — |
| Pump type | — | Rotary vane pump[3] |
| Construction | — | Oil-sealed rotational displacement pump[3] |
| Stage | — | Dual-stage[4] |
| Variants | — | Duo 3 standard version, Duo 3 M, Duo 3 MC[1] |
| Duo 3 M difference | — | Magnetic coupling[1] |
| Duo 3 MC differences | — | Operating fluid F4; magnetic coupling encapsulated on the pump side; vane material changed; hose connection on the gas ballast valve; leakage rate ≤ 1 × 10-8 Pa m3/s[1] |
| Gas ballast / safety valve | — | Integrated gas ballast and safety valve[4] |
| Pumping speed at 50 Hz | — | 2.5 m3/h[4] |
| Pumping speed at 60 Hz | — | 2.9 m3/h[4] |
| Ultimate pressure with gas ballast | — | 3 × 10-3 hPa[4] |
| Ultimate pressure without gas ballast | — | 3 × 10-3 hPa[4] |
| Exhaust pressure, max. | — | 1,500 hPa[4] |
| Rotation speed at 50 Hz | — | 3,000 rpm[4] |
| Rotation speed at 60 Hz | — | 3,600 rpm[4] |
| Cooling method | — | Air[4] |
| Motor version | — | 1-ph motor[4] |
| Ambient temperature | — | 12-40 °C[4] |
| Emission sound pressure level without gas ballast at 50 Hz | — | 53 dB(A)[4] |
| Mains requirement voltage 50 Hz | — | 230-240 V[4] |
| Mains requirement voltage 60 Hz | — | 230-240 V[4] |
| Recommended mains fuse capacity | — | 4 A[4] |
| Operating fluid | — | P3[4] |
| Operating fluid filling | — | 0.4 l[4] |
| Leak rate safety valve | — | 1 × 10-5 Pa m3/s[4] |
| Dimensions | — | 309 x 129 x 222 mm[4] |
| Rated power 50 Hz | — | 0.15 kW[4] |
| Rated power 60 Hz | — | 0.18 kW[4] |
| Protection category | — | IP40[4] |
| Weight | — | 11.3 kg[4] |
| Manufacturer | — | Pfeiffer[5] |
| Pump construction | — | Oil-sealed[1] |
| Stages | — | Two-stage[1] |
| Application range | — | Coarse and medium vacuum[1] |
| Variants stated | — | Standard version, M version, MC version[1] |
| MC version changes | — | Operating fluid F4, magnetic coupling encapsulated on the pump side, changed vane material, hose connection on the gas ballast valve, leakage rate ≤ 1 × 10-8 Pa m3/s[1] |