Comparison ledger
ABM -407B-1-S-CES293 Robot, Advanced Energy Apex 1513, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Apex 1513Advanced Energy | |
|---|---|---|
| OEM | ABM | Advanced Energy |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | Advanced Energy Apex 1513 |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[1] | APEX-1513[2] |
| Description | ROBOT[1] | Generator[5] |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Part Number | — | 0190-19022-001 Model Number: 3156110-005[2] |
| Manufacturer | — | Advanced Energy[2] |
| Version | — | Spares[2] |
| Quantity | — | 1[5] |
| Model Number | — | 3156110-005[2] |
| Output Power | — | 1500 W (1.5 kW)[6] |
| Frequency | — | 13.56 MHz[6] |
| Frequency Accuracy | — | ±0.005%[6] |
| RF Output Connector | — | N female[6] |
| Cooling | — | Forced air[6] |
| Communication Interfaces | — | Analog, RS-232/RS-485, DeviceNet, EtherCAT optional[6] |
| Input Voltage (Single-Phase) | — | 208 V AC, single phase[6] |
| Input Voltage (Three-Phase) | — | 3ɸ, 208 V AC, 50/60 Hz[7] |
| Weight | — | 15.9 kg (35 lbs)[6] |
| Weight (Alternate) | — | 35 kg[8] |
| Dimensions (H x W x D) | — | 88 x 483 x 508 mm (3.5 x 19 x 20 in)[6] |
| Country of Origin | — | USA[6] |
| Certifications | — | CE, UL, RoHS[6] |